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Numéro de référence | S9089 | ||
Description | Si Photodiode | ||
Fabricant | Hamamatsu Photonic Systems | ||
Logo | |||
1 Page
PHOTODIODE
Si photodiodewww.DataSheet4U.com
S9089
Highly reliable quartz window photodiode for VUV detection
S9089 is a VUV (vacuum ultraviolet) sensitive Si photodiode ideal for ArF (λ=193 nm) excimer laser detection. Compared to conventional types,
S9089 offers improved sensitivity stability against VUV irradiation. The package is hermetically sealed by a newly developed quartz window that
keeps it fully airtight and highly reliable. This package is also easier to handle than S8551 windowless type photodiode.
Features
l Highly reliable quartz window
l High reliable detection of ArF excimer laser (λ=193 nm)
l Active area: 5.8 × 5.8 mm
l TO-8 metal package
Applications
l ArF (λ=193 nm), KrF (λ=248 nm) excimer laser
measurement
l UV light detection, etc.
I Absolute maximum ratings (Ta=25 °C)
Parameter
Symbol
Reverse voltage
VR Max.
Operating temperature
Topr
Storage temperature
Tstg
I Electrical and optical characteristics (Ta=25 °C)
Parameter
Symbol
Condition
Spectral response range
l
Peak sensitivity wavelength
lp
Photo sensitivity
S
l=193 nm
l=800 nm
Dark current
ID VR=10 mV
Rise time
tr
VR=0 V, RL=1 kW
l=655 nm, 10 to 90 %
Terminal capacitance
Ct VR=0 V, f=10 kHz
Value
5
-40 to +100
-55 to +125
Min. Typ.
- 190 to 1000
- 780
0.04 0.06
0.4 0.5
- 0.02
-2
- 0.7
Max.
-
-
-
-
0.5
-
-
Unit
V
°C
°C
Unit
nm
nm
A/W
A/W
nA
µs
nF
PRELIMINARY DATA
Sep. 2002
1
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Pages | Pages 2 | ||
Télécharger | [ S9089 ] |
No | Description détaillée | Fabricant |
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